Merck, the German science and technology company, has inaugurated a brand new Molybdenum Dioxide Dichloride (MoO₂Cl₂) manufacturing facility at its Eumseong site in Chungcheongbuk-do, South Korea.
Merck’s Molybdenum dioxide dichloride product presenting is an incorporated solution integrating molybdenum manufacturing with the CK Vapor delivery system. The solution displays Merck’s latest strategy of advancing beyond traditional materials to integrate materials science, equipment, metrology and inspection, and digital intelligence across the semiconductor production workflow.
“AI is converting semiconductor industry, driving more complexity and spped of innovation. Traditional scaling tactics and advances in individual materials alone are no longer sufficient to maintain future growth. The next wave of innovation will be drive by system integration,” stated Mr. Benjamin Hein, Member of the Executive Board and CEO Electronics. “That is why we are building on our sturdy materials expertise to supply incorporated workflow solutions. Our Molybdenum solution, which incorporate chemistry and delivery system, is a a successful example of this method,” he added.
Mr. Bing Han, Executive Vice President and Head of the Thin Films Business Unit, mentioned that molybdenum permits nodes and increasingly complex chip architectures. “To better serve our clients, we have been localising our molybdenum solutions in Korea via seamless supply chain. This consists of new Molybdenum manufacturing facility in Eumseong site, and the shipping systems already being manufactured at our Ansan site. This setup will reinforce supply security and support accelerate innovation for clients in Korea and across Asia,” he noted.
As memory structures persist to scale vertically, Merck anticipates increasing demand for materials that provide lower resistance and wonderful step coverage. Molybdenum is a novel fabric material applied not limited to 3D NAND programs; but also for DRAM wordlines and logic devices in the future, assisting customers as they advance semiconductor architectures and put together for persist technology advancement for AI, it introduced.
Merck gives a range of Molybdenum precursors, such as molybdenum dichloride dioxide (MoO2Cl2), a specialised precursor used in chemical vapour deposition (CVD) and Atomic Layer Deposition (ALD) procedures. The precursor is offered in integration with Chemkeeper delivery systems, a tailored solution presented by Merck.
“By integrating the precursor with the delivery system, the solution is designed to support high-volume manufacturing through dependable material delivery, high process uptime, and more than 99% material uasage efficiency. It also has the ability to make contributions to a lower overall cost of ownership,” the company informed.
The Eumseong site will offer local manufacturing of molybdenum precursors together with supply and technical support for semiconductor customers in Korea. By integrating molecule production in Eumseong with delivery-system capabilities from Ansan and Merck’s worldwide research and technology community, Merck will assist clients with material qualification, supply continuity and faster responses to changing proceess requirements.
Established in 2015, the Eumseong site is a key semiconductor materials production hub manufacturing high-k atomic layer deposition (ALD) precursors used in semiconductor thin-film techniques. The site was into incorporated into Merck through the acquisition of M Chemicals Inc in 2023.
